Shutdown lampoly: chiller is leaking.
booth at snf.stanford.edu
booth at snf.stanford.edu
Sun Dec 23 09:05:38 PST 2012
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Problem Clear lampoly: cleared door, processed wafer & put in box.
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Shutdown Clear lampoly: replaced leaking poly line.
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Problem Clear lampoly: cleared door, processed wafer & put in box.
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Shutdown Clear lampoly: replaced leaking poly line.
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