Shutdown lampoly: load lock door down AGAIN
aaronp at snf.stanford.edu
aaronp at snf.stanford.edu
Sun Dec 23 09:05:38 PST 2012
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Shutdown lampoly: purging chamber over night with n2. chamber will need to be vented, in order to remove vat throttle valve assy.
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Shutdown Clear lampoly: Solenoid activated on removal of cover. Jim
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Previous message:
Shutdown lampoly: purging chamber over night with n2. chamber will need to be vented, in order to remove vat throttle valve assy.
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Shutdown Clear lampoly: Solenoid activated on removal of cover. Jim
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