Shutdown lampoly:

jawad at snf.stanford.edu jawad at snf.stanford.edu
Sun Dec 23 09:05:38 PST 2012

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Alarm 297, Chamber pressure did not equalize to xover pressure.
There are two LAMpoly dummy wafers stuck on the transport.

Previous message: Shutdown Clear lampoly: Reset when sol. cover came off. Jim
Next message: Shutdown Clear lampoly: Contact Nancy, Aaron or Jim for fix.
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