Problem lampoly SNF 2012-07-27 21:56:27: Surface roughness?

mtang at snf.stanford.edu mtang at snf.stanford.edu
Sun Dec 23 09:05:38 PST 2012


Everything checks out fine.  The user's recipe was lacking a breakthrough step.  When put back in, the residue disappeared.  Trenching was also observed, but some adjustment of the recipe for these particular structures should take care of this.



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