Problem lampoly SNF 2012-08-07 12:42:36: Error 80 during chamber etch.

sclaussen at snf.stanford.edu sclaussen at snf.stanford.edu
Sun Dec 23 09:05:38 PST 2012


Ran a chamber etch (Recipe 99) after warming up the chamber, and got an Error 80 during Step 3 (Pressure not reached, something about the RF). I aborted the Recipe, ran it again, and it worked fine.



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