Problem lampoly SNF 2012-08-07 12:42:36: Error 80 during chamber etch.

mtang at snf.stanford.edu mtang at snf.stanford.edu
Sun Dec 23 09:05:38 PST 2012


Presets for pressure and RF were way off.  Adjusted as follows:
Pressure:  1 sec. delay,  460/30
Upper RF:  500 msec delay, 27000/19000 
Lower RF:  default
Ran a few wafers and control is good.



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