Problem lampoly SNF 2012-08-07 12:42:36: Error 80 during chamber etch.

[mtang at snf.stanford.edu]

Presets for pressure and RF were way off.  Adjusted as follows:
Pressure:  1 sec. delay,  460/30
Upper RF:  500 msec delay, 27000/19000 
Lower RF:  default
Ran a few wafers and control is good.