Shutdown lampoly SNF 2012-08-10 09:38:04: wafer left in the chamber?

cchen86 at snf.stanford.edu cchen86 at snf.stanford.edu
Sun Dec 23 09:05:38 PST 2012


When i did 3 wafers for cleaning, the last wafer did not come out of the chamber, and #54 alarm was triggered.



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