Shutdown lampoly SNF 2012-08-10 14:00:54: Alarm 376 - Gap Centering

scarreon at snf.stanford.edu scarreon at snf.stanford.edu
Sun Dec 23 09:05:38 PST 2012


First ran into an alarm that stated the arm was not able to extend/do requested action.  Then ran into an alarm that stated the gap needed to finish centering.  After waiting some time, was not able to clear it.  Dummy wafers are still in the tool.



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