Comment lampoly SNF 2012-08-10 16:19:37: Wafers in LL and gap error

mtang at snf.stanford.edu mtang at snf.stanford.edu
Sun Dec 23 09:05:38 PST 2012


There are two wafers in the entrance loadlock, although the machine believes there is just one in the EXIT loadlock (which is empty).  Not sure how this happened (two wafers in one slot on the load cassette?)  I don't know if there is one still left inside the chamber.  System error 376 will not clear - gap drive not centering during initialization.  This error commonly appears during initialization but generally clears itself within a few seconds.  It is not clearing now.  



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