Comment lampoly SNF 2012-08-13 15:06:50: Update lost wafer

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Sun Dec 23 09:05:38 PST 2012


Found two wafers in the chamber.  One was shattered and the other one was stuck to the clamp.  Cleaned the chamber and the clamp.  Now running the post wipe down cycle purge.  Still need to cycle wafers after the purge.



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