Shutdown lampoly SNF 2012-08-13 13:47:17: Lost wafer in chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Sun Dec 23 09:05:38 PST 2012


Replaced dummy wafers.  Ran chamber clean and condition.  Cycled 8 wafers with no problems.



More information about the lampoly-pcs mailing list