Shutdown lampoly SNF 2012-08-15 17:25:44: wafer stuck in chamber

wslee at snf.stanford.edu wslee at snf.stanford.edu
Sun Dec 23 09:05:38 PST 2012


Wafer 1 did not unload into the exit load lock. Wafer 2 loaded into the chamber and began etching. I aborted the recipe and then one of the wafers (I think the second one to enter) came out. I never saw the other one. 



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