Shutdown lampoly SNF 2012-08-17 12:22:05: Loadlock pump problem
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Sun Dec 23 09:05:38 PST 2012
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Shutdown lampoly SNF 2012-08-15 17:25:44: wafer stuck in chamber
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Shutdown lampoly SNF 2012-08-17 12:22:05: Loadlock pump problem
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LL pump keeps shutting off. Need to replace.
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Shutdown lampoly SNF 2012-08-15 17:25:44: wafer stuck in chamber
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Shutdown lampoly SNF 2012-08-17 12:22:05: Loadlock pump problem
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