Problem lampoly SNF 2012-09-06 17:47:00: turbo frequency slowing down

wslee at snf.stanford.edu wslee at snf.stanford.edu
Sun Dec 23 09:05:38 PST 2012


I checked to see what the turbo speed was for recipe 99. It got as low as 370Hz during the 300s clean. Since the last repair job, I have noticed that the turbo stays at 399-400Hz during the entire etch.



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