Problem lampoly SNF 2012-09-06 17:47:00: turbo frequency slowing down

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Sun Dec 23 09:05:38 PST 2012


Ran two wafers with no problems.  The turbo speed slowing down is normal for the long etches.  The 400 Hz speed read by the user was the setpoint.



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