Shutdown lampoly SNF 2012-09-11 21:10:10: entrance load lock arm failed initialize reqeust

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Sun Dec 23 09:05:38 PST 2012


reinitialized the entrace robot arm.  Cycled 6 wafers with no problems.



More information about the lampoly-pcs mailing list