Comment lampoly SNF 2012-10-08 15:58:18: Re: request for wet clean

bchui at bchui at
Sun Dec 23 09:05:38 PST 2012

Hi Elmer, Cesar, 
Thanks for getting the machine back online so quickly!  As for the wet clean, there are indications the grass is related to my wafers in particular; still investigating.  So the chamber might be OK. Thanks, Ben

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