Shutdown lampoly SNF 2012-10-30 20:13:22: Alarm 18

dianmin at snf.stanford.edu dianmin at snf.stanford.edu
Sun Dec 23 09:05:38 PST 2012


Alarm 18: shuttle vaccum sense fail, sensor FALSE, should be TRUE.
Alarm shown up during the process. There is one dummy wafer still in the chamber.



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