Shutdown lampoly SNF 2012-10-30 20:13:22: Alarm 18

dianmin at dianmin at
Sun Dec 23 09:05:38 PST 2012

Alarm 18: shuttle vaccum sense fail, sensor FALSE, should be TRUE.
Alarm shown up during the process. There is one dummy wafer still in the chamber.

More information about the lampoly-pcs mailing list