Shutdown lampoly SNF 2012-11-01 14:37:58: error message

mzhang2 at snf.stanford.edu mzhang2 at snf.stanford.edu
Sun Dec 23 09:05:38 PST 2012


wafer not sensed at exit cassette. Probably wafer got stuck in the etching chamber



More information about the lampoly-pcs mailing list