Shutdown lampoly SNF 2012-11-15 10:48:59: Exit arm failed, sample stuck inside

dianmin at snf.stanford.edu dianmin at snf.stanford.edu
Sun Dec 23 09:05:38 PST 2012

Previous message: Problem lampoly SNF 2012-11-15 10:44:03: Exit arm failed! My wafer inside
Next message: Shutdown lampoly SNF 2012-11-15 10:48:59: Exit arm failed, sample stuck inside
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Alarm 22 and alarm 96. My wafer stuck inside. Need help asap. Thanks!

Previous message: Problem lampoly SNF 2012-11-15 10:44:03: Exit arm failed! My wafer inside
Next message: Shutdown lampoly SNF 2012-11-15 10:48:59: Exit arm failed, sample stuck inside
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the lampoly-pcs mailing list