Shutdown lampoly SNF 2012-11-15 10:48:59: Exit arm failed, sample stuck inside

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Sun Dec 23 09:05:38 PST 2012


Found two wafers inside the main chamber, one of the wafer
broke into tiny pieces. Vacuum out broken wafer chips and wet clean
chamber . Checked and verified wafer transfer, ran 5 wafers using
recipe#1 w/out problem.



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