Shutdown lampoly SNF 2012-11-28 17:24:05: wafer stuck inside the chamber
dianmin at snf.stanford.edu
dianmin at snf.stanford.edu
Sun Dec 23 09:05:38 PST 2012
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Comment lampoly SNF 2012-11-27 09:39:00: lampoly dummies in terrible shape
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Shutdown lampoly SNF 2012-11-28 17:24:05: wafer stuck inside the chamber
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Alarm Exit arm failed
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Comment lampoly SNF 2012-11-27 09:39:00: lampoly dummies in terrible shape
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Shutdown lampoly SNF 2012-11-28 17:24:05: wafer stuck inside the chamber
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