Shutdown lampoly SNF 2012-11-28 17:24:05: wafer stuck inside the chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Sun Dec 23 09:05:38 PST 2012


Recovered user's quartz wafer.  The exit load lock cassette's wafer sensor could not detect the quartz wafer.  The exit arm tried to pickup a second wafer from the chamber with the quartz wafer still on the blade.



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