Comment lampoly SNF 2012-12-15 16:07:59: re: wafers stuck in multiple chambers

xuanwu at xuanwu at
Sun Dec 23 09:05:38 PST 2012

More details:
There should be 1 wafer stuck in the unload chamber, 1 wafer in the etch chamber, 2 wafers in the load chamber, and 1 wafer on the flat-finder arm.

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