Shutdown lampoly SNF 2012-12-15 16:01:42: wafers stuck inside multiple chambers

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Sun Dec 23 09:05:38 PST 2012


Recovered wafers on both enterance and exit load lock. The
wafer inside the main chamber broke into tiny wafer chips,
vacuumed out wafer chips and wet clean chamber. Checked 
and verified wafer handoff from exit load lock to reciever elevator.



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