December 2012 Archives by subject

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Starting: Sun Dec 23 09:05:38 PST 2012
Ending: Sun Dec 23 09:05:38 PST 2012
Messages: 124

• Comment lampoly: software timer/counter error.   booth at snf.stanford.edu
• Comment lampoly SNF 2011-04-18 04:10:02: LAM often breaks first wafer   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2011-04-30 06:31:38: Leak Up rate   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2012-06-19 17:58:06: Filled lower chiller ....   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2012-06-25 18:05:57: Turbo held up fine   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2012-08-10 16:19:37: Wafers in LL and gap error   mtang at snf.stanford.edu
• Comment lampoly SNF 2012-08-13 15:06:50: Update lost wafer   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2012-08-13 15:06:50: Update lost wafer   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2012-08-17 14:52:23: Update LL pump problem   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2012-08-17 14:52:23: Update LL pump problem   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2012-09-04 17:28:26: n o LTO dummnies for cleanning   raneeyoo at snf.stanford.edu
• Comment lampoly SNF 2012-10-05 12:47:52: Only 7 dummies available   lofaolain at snf.stanford.edu
• Comment lampoly SNF 2012-10-05 17:45:49: running SF6 recipe99 chamber clean...   bchui at snf.stanford.edu
• Comment lampoly SNF 2012-10-07 20:37:49: Update   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2012-10-07 20:37:49: Update   cbaxter at snf.stanford.edu
• Comment lampoly SNF 2012-10-08 11:48:47: Wet clean update   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2012-10-08 11:48:47: Wet clean update   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2012-10-08 15:58:18: Re: request for wet clean   bchui at snf.stanford.edu
• Comment lampoly SNF 2012-10-08 15:58:18: Re: request for wet clean   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2012-10-21 07:53:26: Update   cbaxter at snf.stanford.edu
• Comment lampoly SNF 2012-10-31 03:47:08: Suggestion re shuttle vacuum fail   bchui at snf.stanford.edu
• Comment lampoly SNF 2012-10-31 03:47:08: Suggestion re shuttle vacuum fail   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2012-11-11 07:41:31: Chamber 's Leak Rate   cbaxter at snf.stanford.edu
• Comment lampoly SNF 2012-11-11 07:41:31: Chamber 's Leak Rate   cbaxter at snf.stanford.edu
• Comment lampoly SNF 2012-11-11 07:52:00: Chamber Leak Rate   cbaxter at snf.stanford.edu
• Comment lampoly SNF 2012-11-13 10:00:13: CF4   mdickey at snf.stanford.edu
• Comment lampoly SNF 2012-11-27 09:39:00: lampoly dummies in terrible shape   tasyurek at snf.stanford.edu
• Comment lampoly SNF 2012-12-15 16:07:59: re: wafers stuck in multiple chambers   xuanwu at snf.stanford.edu
• Comment lampoly SNF 2012-12-15 16:07:59: re: wafers stuck in multiple chambers   cbaxter at snf.stanford.edu
• Comment lampoly SNF 2012-12-16 10:07:20: sender cassette had 4 resist coated wafers in it, I put them on the table across lampoly on cleanroom wipes   tasyurek at snf.stanford.edu
• Problem Clear lampoly:   cbaxter at snf.stanford.edu
• Problem Clear lampoly:   cbaxter at snf.stanford.edu
• Problem Clear lampoly: changed filter   cbaxter at snf.stanford.edu
• Problem Clear lampoly: cleared door, processed wafer & put in box.   booth at snf.stanford.edu
• Problem Clear lampoly: cleared fault. Process restarted normally.   booth at snf.stanford.edu
• Problem Clear lampoly: installed o2 mfc and tested   cbaxter at snf.stanford.edu
• Problem Clear lampoly: re-teach throttle controller @pressure 10,15 m/t.   cbaxter at snf.stanford.edu
• Problem Clear lampoly: rebooted lampoly.   booth at snf.stanford.edu
• Problem Clear lampoly: rebooth system...   cbaxter at snf.stanford.edu
• Problem lampoly: "Hard pressure tolerance reached during RF ON step"   kalavade at snf.stanford.edu
• Problem lampoly: alarm 184 - water chiller has failed - cleared the alarm, but comes back with same problem - no processing done   frankliu at snf.stanford.edu
• Problem lampoly: Inner Ld Lk Door not closed   price at snf.stanford.edu
• Problem lampoly: Internal timer overflowed   bchui at snf.stanford.edu
• Problem lampoly: internal timer will time out in 23 hours   bchui at snf.stanford.edu
• Problem lampoly: LD LK inner Door not closed-waf in chbr.   price at snf.stanford.edu
• Problem lampoly: MFC#7 O2 intermittant zero drift noticed.   booth at snf.stanford.edu
• Problem lampoly: not sure the last one went through - water chiller has failed   frankliu at snf.stanford.edu
• Problem lampoly: operating system error in lam-   kalavade at snf.stanford.edu
• Problem lampoly: Still not registering yellow - one last time - water chiller has failed   frankliu at snf.stanford.edu
• Problem lampoly SNF 2012-07-27 16:12:44: Run recipe 99 before running wafers   mtang at snf.stanford.edu
• Problem lampoly SNF 2012-07-27 21:56:27: Surface roughness?   mtang at snf.stanford.edu
• Problem lampoly SNF 2012-08-03 13:26:30: Error 80   cbaxter at snf.stanford.edu
• Problem lampoly SNF 2012-08-07 12:42:36: Error 80 during chamber etch.   mtang at snf.stanford.edu
• Problem lampoly SNF 2012-08-07 12:42:36: Error 80 during chamber etch.   sclaussen at snf.stanford.edu
• Problem lampoly SNF 2012-09-06 10:40:45: none of the buttons work   tasyurek at snf.stanford.edu
• Problem lampoly SNF 2012-09-06 10:40:45: none of the buttons work   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2012-09-06 17:47:00: turbo frequency slowing down   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2012-09-06 17:47:00: turbo frequency slowing down   wslee at snf.stanford.edu
• Problem lampoly SNF 2012-09-11 13:19:56: arm won't sense the wafer   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2012-09-11 13:19:56: arm won't sense the wafer   pnataraj at snf.stanford.edu
• Problem lampoly SNF 2012-10-07 11:35:09: Request for wet clean   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2012-10-07 11:35:09: Request for wet clean   mtang at snf.stanford.edu
• Problem lampoly SNF 2012-10-27 15:41:18: Alarm 177   dianmin at snf.stanford.edu
• Problem lampoly SNF 2012-10-27 15:41:18: Alarm 177   cbaxter at snf.stanford.edu
• Problem lampoly SNF 2012-10-31 10:56:54: wafer dropped in loading chamber   mzhang2 at snf.stanford.edu
• Problem lampoly SNF 2012-10-31 10:56:54: wafer dropped in loading chamber   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2012-11-13 08:36:48: CF4   mdickey at snf.stanford.edu
• Problem lampoly SNF 2012-11-13 08:36:48: CF4   cbaxter at snf.stanford.edu
• Problem lampoly SNF 2012-11-15 10:44:03: Exit arm failed! My wafer inside   cbaxter at snf.stanford.edu
• Problem lampoly SNF 2012-11-15 10:44:03: Exit arm failed! My wafer inside   dianmin at snf.stanford.edu
• Shutdown Clear lampoly: chamber back together and tested..   cbaxter at snf.stanford.edu
• Shutdown Clear lampoly: changed both filter on chiller   cbaxter at snf.stanford.edu
• Shutdown Clear lampoly: Contact Nancy, Aaron or Jim for fix.   mcvittie at snf.stanford.edu
• Shutdown Clear lampoly: installed o2 mfc and tested   cbaxter at snf.stanford.edu
• Shutdown Clear lampoly: removed wafer & cleared shutdown.   booth at snf.stanford.edu
• Shutdown Clear lampoly: removed wafer & did DI wipe of chamber.   booth at snf.stanford.edu
• Shutdown Clear lampoly: replaced leaking poly line.   booth at snf.stanford.edu
• Shutdown Clear lampoly: Reset when sol. cover came off. Jim   mcvittie at snf.stanford.edu
• Shutdown Clear lampoly: Solenoid activated on removal of cover. Jim   mcvittie at snf.stanford.edu
• Shutdown Clear lampoly: we not vent chamber at this time, lam eng. will try to cal. gas's again.   cbaxter at snf.stanford.edu
• Shutdown lampoly:   jawad at snf.stanford.edu
• Shutdown lampoly: chiller is leaking.   booth at snf.stanford.edu
• Shutdown lampoly: gas 1 hard tolerance faultDate: Nov 16, 2000 10:46:21 PM   cbaxter at snf.stanford.edu
• Shutdown lampoly: gas 1 hard tolerance faultDate: Nov 16, 2000 7:47:30 PM   true at snf.stanford.edu
• Shutdown lampoly: input ld lk door not closing   price at snf.stanford.edu
• Shutdown lampoly: load lock door down AGAIN   aaronp at snf.stanford.edu
• Shutdown lampoly: mfc#7 is removed for repair.   cbaxter at snf.stanford.edu
• Shutdown lampoly: need to vent chamber and check throttle valve.   cbaxter at snf.stanford.edu
• Shutdown lampoly: purging chamber over night with n2. chamber will need to be vented, in order to remove vat throttle valve assy.   cbaxter at snf.stanford.edu
• Shutdown lampoly: Shutdown - chiller fault   booth at snf.stanford.edu
• Shutdown lampoly: transport failure   mordovan at snf.stanford.edu
• Shutdown lampoly: Wafer in chamber. Jim   mordovan at snf.stanford.edu
• Shutdown lampoly SNF 2012-08-10 09:38:04: wafer left in the chamber?   mdickey at snf.stanford.edu
• Shutdown lampoly SNF 2012-08-10 09:38:04: wafer left in the chamber?   cchen86 at snf.stanford.edu
• Shutdown lampoly SNF 2012-08-10 14:00:54: Alarm 376 - Gap Centering   scarreon at snf.stanford.edu
• Shutdown lampoly SNF 2012-08-10 14:00:54: Alarm 376 - Gap Centering   cbaxter at snf.stanford.edu
• Shutdown lampoly SNF 2012-08-13 13:47:17: Lost wafer in chamber   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2012-08-13 13:47:17: Lost wafer in chamber   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2012-08-15 17:25:44: wafer stuck in chamber   wslee at snf.stanford.edu
• Shutdown lampoly SNF 2012-08-15 17:25:44: wafer stuck in chamber   mdickey at snf.stanford.edu
• Shutdown lampoly SNF 2012-08-17 12:22:05: Loadlock pump problem   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2012-08-17 12:22:05: Loadlock pump problem   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2012-09-11 21:10:10: entrance load lock arm failed initialize reqeust   jaehlee at snf.stanford.edu
• Shutdown lampoly SNF 2012-09-11 21:10:10: entrance load lock arm failed initialize reqeust   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2012-10-02 17:02:33: ELL purge doesn't work (doesn't get to ATM)   bchui at snf.stanford.edu
• Shutdown lampoly SNF 2012-10-02 17:02:33: ELL purge doesn't work (doesn't get to ATM)   cbaxter at snf.stanford.edu
• Shutdown lampoly SNF 2012-10-06 11:05:36: turbo down   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2012-10-06 11:05:36: turbo down   pnataraj at snf.stanford.edu
• Shutdown lampoly SNF 2012-10-28 19:06:21: Heat exchanger problem   cbaxter at snf.stanford.edu
• Shutdown lampoly SNF 2012-10-28 19:06:21: Heat exchanger problem   cbaxter at snf.stanford.edu
• Shutdown lampoly SNF 2012-10-30 20:13:22: Alarm 18   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2012-10-30 20:13:22: Alarm 18   dianmin at snf.stanford.edu
• Shutdown lampoly SNF 2012-10-31 13:03:57: Dropped wafer in the chamber   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2012-10-31 13:03:57: Dropped wafer in the chamber   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2012-11-01 14:37:58: error message   cbaxter at snf.stanford.edu
• Shutdown lampoly SNF 2012-11-01 14:37:58: error message   mzhang2 at snf.stanford.edu
• Shutdown lampoly SNF 2012-11-15 10:48:59: Exit arm failed, sample stuck inside   cbaxter at snf.stanford.edu
• Shutdown lampoly SNF 2012-11-15 10:48:59: Exit arm failed, sample stuck inside   dianmin at snf.stanford.edu
• Shutdown lampoly SNF 2012-11-28 17:24:05: wafer stuck inside the chamber   dianmin at snf.stanford.edu
• Shutdown lampoly SNF 2012-11-28 17:24:05: wafer stuck inside the chamber   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2012-12-15 16:01:42: wafers stuck inside multiple chambers   cbaxter at snf.stanford.edu
• Shutdown lampoly SNF 2012-12-15 16:01:42: wafers stuck inside multiple chambers   xuanwu at snf.stanford.edu
• Shutdown lampoly SNF 2012-12-17 11:15:35: Loading arm frozen   lofaolain at snf.stanford.edu
• Shutdown lampoly SNF 2012-12-17 11:15:35: Loading arm frozen   eenriquez at snf.stanford.edu

Last message date: Sun Dec 23 09:05:38 PST 2012
Archived on: Sun Dec 23 09:05:57 PST 2012

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