From cbaxter at snf.stanford.edu Sun Jul 1 20:42:12 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 1 Jul 2012 20:42:12 -0700 Subject: Shutdown lampoly SNF 2012-07-01 20:42:11: Exit l/l and purge problem. Message-ID: Adjusted the N2 purge supply for both entrance and exit load lock. I shutdown the tool to continue working on the turbo purge problem... From eenriquez at snf.stanford.edu Mon Jul 2 14:59:09 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 2 Jul 2012 14:59:09 -0700 Subject: Shutdown lampoly SNF 2012-07-01 20:42:11: Exit l/l and purge problem. Message-ID: Replace the heat exchanger. From eenriquez at snf.stanford.edu Mon Jul 2 14:59:15 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 2 Jul 2012 14:59:15 -0700 Subject: Problem lampoly SNF 2012-06-29 12:30:17: Exit LL/Turbo purge alarms Message-ID: Adjusted the N2 purge supply for both entrance and exit load lock From eenriquez at snf.stanford.edu Mon Jul 2 14:59:28 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 2 Jul 2012 14:59:28 -0700 Subject: Problem lampoly SNF 2012-06-26 14:19:36: internal timer will overflow in 72 hours Message-ID: Reset the system From eenriquez at snf.stanford.edu Thu Jul 5 08:07:33 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 5 Jul 2012 08:07:33 -0700 Subject: Problem lampoly SNF 2012-06-25 17:08:04: Restricted use Message-ID: Recipes have been verified to run without problems. From wshuang at snf.stanford.edu Sat Jul 7 15:54:27 2012 From: wshuang at snf.stanford.edu (wshuang at snf.stanford.edu) Date: Sat, 7 Jul 2012 15:54:27 -0700 Subject: Shutdown lampoly SNF 2012-07-07 15:54:27: Alarm 2 entrance load failed requested rotate action Message-ID: The machine was working well when I started using it and I etched several wafers. Alarm2 suddenly appeared and my wafer was tracked on the rotation stage now. From cbaxter at snf.stanford.edu Sun Jul 8 13:49:25 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 8 Jul 2012 13:49:25 -0700 Subject: Shutdown lampoly SNF 2012-07-07 15:54:27: Alarm 2 entrance load failed requested rotate action Message-ID: Recovered wafer on load station and repaired bad wire connection on load arm ratation position sensor. From mdickey at snf.stanford.edu Tue Jul 17 06:51:33 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 17 Jul 2012 06:51:33 -0700 Subject: Problem lampoly SNF 2012-07-17 06:51:32: CL2 Message-ID: Problem with CL2 delivery. Run no CL2 at this time From mdickey at snf.stanford.edu Tue Jul 17 08:54:08 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 17 Jul 2012 08:54:08 -0700 Subject: Problem lampoly SNF 2012-07-17 06:51:32: CL2 Message-ID: CL2 back on line From pnataraj at snf.stanford.edu Tue Jul 17 18:45:27 2012 From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu) Date: Tue, 17 Jul 2012 18:45:27 -0700 Subject: Problem lampoly SNF 2012-07-17 18:45:27: entrance load fail error Message-ID: ran nicely for a while got this error. all the chambers are empty...NO WAFERS INSIDE !!! From mtang at snf.stanford.edu Wed Jul 18 08:20:13 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 18 Jul 2012 08:20:13 -0700 Subject: Shutdown lampoly SNF 2012-07-18 08:20:12: Entrance loadlock failure Message-ID: From mdickey at snf.stanford.edu Thu Jul 19 08:41:17 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 19 Jul 2012 08:41:17 -0700 Subject: Shutdown lampoly SNF 2012-07-18 08:20:12: Entrance loadlock failure Message-ID: REhomed entrance arm From cbaxter at snf.stanford.edu Thu Jul 19 11:08:40 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 19 Jul 2012 11:08:40 -0700 Subject: Problem lampoly SNF 2012-07-17 18:45:27: entrance load fail error Message-ID: From wslee at snf.stanford.edu Fri Jul 20 10:37:59 2012 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Fri, 20 Jul 2012 10:37:59 -0700 Subject: Problem lampoly SNF 2012-07-20 10:37:58: vacuum sense fail alarm Message-ID: Ran 1 wafer on recipe 99, the vacuum sense fail alarm went off before the wafer loaded the loadlock. The wafers are still there. From scarreon at snf.stanford.edu Fri Jul 20 12:03:13 2012 From: scarreon at snf.stanford.edu (scarreon at snf.stanford.edu) Date: Fri, 20 Jul 2012 12:03:13 -0700 Subject: Shutdown lampoly SNF 2012-07-20 12:03:13: Wafers Stuck; Vacuum Sense Fail Message-ID: Went to use the tool but noticed that it had an orange status on Coral. Upon entering the cleanroom, I saw that there were wafers stuck in the machine. New processes cannot be started. From mtang at snf.stanford.edu Fri Jul 20 14:54:01 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 20 Jul 2012 14:54:01 -0700 Subject: Shutdown lampoly SNF 2012-07-20 12:03:13: Wafers Stuck; Vacuum Sense Fail Message-ID: Reset system, ran wafer clearout. The vacuum wand was pretty dirty, a few particles and some brown sticky residue, so cleaned that. Ran 10 wafers without problem. From mtang at snf.stanford.edu Fri Jul 20 14:54:16 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 20 Jul 2012 14:54:16 -0700 Subject: Problem lampoly SNF 2012-07-20 10:37:58: vacuum sense fail alarm Message-ID: See shutdown clear for today. From mtang at snf.stanford.edu Fri Jul 27 16:12:45 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 27 Jul 2012 16:12:45 -0700 Subject: Problem lampoly SNF 2012-07-27 16:12:44: Run recipe 99 before running wafers Message-ID: I opened the chamber to peek inside. Please make sure to run a few wafers of recipe 99 to condition before running your own recipes. Thanks! From mtang at snf.stanford.edu Fri Jul 27 21:56:28 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 27 Jul 2012 21:56:28 -0700 Subject: Problem lampoly SNF 2012-07-27 21:56:27: Surface roughness? Message-ID: A user reported a sample exhibiting very rough surfaces on the exposed areas and strange profiles. The cause is not yet determined (not sure if it's the etcher as yet). But please run tests and inspect your samples. Please report anything unusual. From bchui at snf.stanford.edu Sun Jul 29 18:21:19 2012 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sun, 29 Jul 2012 18:21:19 -0700 Subject: Comment lampoly SNF 2012-07-29 18:21:19: ran recipe 99 on 15 wafers (60sec each) Message-ID: per Mary's suggestion, as favor to user community