Shutdown lampoly SNF 2012-07-01 20:42:11: Exit l/l and purge problem.

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Sun Jul 1 20:42:12 PDT 2012


Adjusted the N2 purge supply for both entrance and exit
load lock. I shutdown the tool to continue working on the turbo
purge problem...




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