Shutdown lampoly SNF 2012-07-07 15:54:27: Alarm 2 entrance load failed requested rotate action

wshuang at snf.stanford.edu wshuang at snf.stanford.edu
Sat Jul 7 15:54:27 PDT 2012


The machine was working well when I started using it and I etched several wafers. Alarm2 suddenly appeared and my wafer was tracked on the rotation stage now. 




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