Problem lampoly SNF 2012-07-20 10:37:58: vacuum sense fail alarm

wslee at snf.stanford.edu wslee at snf.stanford.edu
Fri Jul 20 10:37:59 PDT 2012

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Ran 1 wafer on recipe 99, the vacuum sense fail alarm went off before the wafer loaded the loadlock. The wafers are still there.

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