Shutdown lampoly SNF 2012-07-20 12:03:13: Wafers Stuck; Vacuum Sense Fail

scarreon at snf.stanford.edu scarreon at snf.stanford.edu
Fri Jul 20 12:03:13 PDT 2012


Went to use the tool but noticed that it had an orange status on Coral.  Upon entering the cleanroom, I saw that there were wafers stuck in the machine.  New processes cannot be started.




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