Shutdown lampoly SNF 2012-07-20 12:03:13: Wafers Stuck; Vacuum Sense Fail

mtang at snf.stanford.edu mtang at snf.stanford.edu
Fri Jul 20 14:54:01 PDT 2012


Reset system, ran wafer clearout.  The vacuum wand was pretty dirty, a few particles and some brown sticky residue, so cleaned that.  Ran 10 wafers without problem.




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