July 2012 Archives by author

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Starting: Sun Jul 1 20:42:12 PDT 2012
Ending: Sun Jul 29 18:21:19 PDT 2012
Messages: 20

• Comment lampoly SNF 2012-07-29 18:21:19: ran recipe 99 on 15 wafers (60sec each)   bchui at snf.stanford.edu
• Shutdown lampoly SNF 2012-07-01 20:42:11: Exit l/l and purge problem.   cbaxter at snf.stanford.edu
• Shutdown lampoly SNF 2012-07-07 15:54:27: Alarm 2 entrance load failed requested rotate action   cbaxter at snf.stanford.edu
• Problem lampoly SNF 2012-07-17 18:45:27: entrance load fail error   cbaxter at snf.stanford.edu
• Shutdown lampoly SNF 2012-07-01 20:42:11: Exit l/l and purge problem.   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2012-06-29 12:30:17: Exit LL/Turbo purge alarms   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2012-06-26 14:19:36: internal timer will overflow in 72 hours   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2012-06-25 17:08:04: Restricted use   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2012-07-17 06:51:32: CL2   mdickey at snf.stanford.edu
• Problem lampoly SNF 2012-07-17 06:51:32: CL2   mdickey at snf.stanford.edu
• Shutdown lampoly SNF 2012-07-18 08:20:12: Entrance loadlock failure   mdickey at snf.stanford.edu
• Shutdown lampoly SNF 2012-07-18 08:20:12: Entrance loadlock failure   mtang at snf.stanford.edu
• Shutdown lampoly SNF 2012-07-20 12:03:13: Wafers Stuck; Vacuum Sense Fail   mtang at snf.stanford.edu
• Problem lampoly SNF 2012-07-20 10:37:58: vacuum sense fail alarm   mtang at snf.stanford.edu
• Problem lampoly SNF 2012-07-27 16:12:44: Run recipe 99 before running wafers   mtang at snf.stanford.edu
• Problem lampoly SNF 2012-07-27 21:56:27: Surface roughness?   mtang at snf.stanford.edu
• Problem lampoly SNF 2012-07-17 18:45:27: entrance load fail error   pnataraj at snf.stanford.edu
• Shutdown lampoly SNF 2012-07-20 12:03:13: Wafers Stuck; Vacuum Sense Fail   scarreon at snf.stanford.edu
• Shutdown lampoly SNF 2012-07-07 15:54:27: Alarm 2 entrance load failed requested rotate action   wshuang at snf.stanford.edu
• Problem lampoly SNF 2012-07-20 10:37:58: vacuum sense fail alarm   wslee at snf.stanford.edu

Last message date: Sun Jul 29 18:21:19 PDT 2012
Archived on: Sun Dec 23 09:06:19 PST 2012

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