From wslee at snf.stanford.edu Mon Jun 11 17:33:36 2012 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Mon, 11 Jun 2012 17:33:36 -0700 Subject: Problem lampoly SNF 2012-06-11 17:33:35: instructions and dummies are missing Message-ID: The printed wiki page for lampoly is missing - which is useful for confirming that the recipes are ok. Also, all the dummies are missing. Please replenish. From cbaxter at snf.stanford.edu Tue Jun 12 15:22:00 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 12 Jun 2012 15:22:00 -0700 Subject: Problem lampoly SNF 2012-06-11 17:33:35: instructions and dummies are missing Message-ID: Reboot system and also got new 24 dummy wafers. Also refilled lower chiller with 50/50 glycol and water. From cbaxter at snf.stanford.edu Fri Jun 15 17:41:10 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 15 Jun 2012 17:41:10 -0700 Subject: Shutdown lampoly SNF 2012-06-15 17:41:09: Chamber wet clean Message-ID: From cbaxter at snf.stanford.edu Fri Jun 15 18:53:16 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 15 Jun 2012 18:53:16 -0700 Subject: Shutdown lampoly SNF 2012-06-15 17:41:09: Chamber wet clean Message-ID: Wet cleaned chamber and condition using recipe 99. From shott at snf.stanford.edu Tue Jun 19 17:58:06 2012 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 19 Jun 2012 17:58:06 -0700 Subject: Comment lampoly SNF 2012-06-19 17:58:06: Filled lower chiller .... Message-ID: Team Etch: I happened to be wandering around the basement and noticed that the lower chiller was reporting a low liquid level even though nobody had yet reported it as a problem. I found the remaining supply of 50/50 glycol/water and added it. That seemed to resolve the problem for the time being. I did, however, use the remainder of the 50/50 mix and did not take the time to mix a new batch. That chiller seems to be leaking. I believe that we have a rebuild spare. Is it time to swap it? Did we ever figure out if we could easily swap the lower and upper chiller interface so that we can double the service life of these dual-channel chillers? Thanks, John From wslee at snf.stanford.edu Tue Jun 19 23:05:57 2012 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Tue, 19 Jun 2012 23:05:57 -0700 Subject: Problem lampoly SNF 2012-06-19 23:05:57: pressure hard tolerance fault and odor Message-ID: I ran recipe 99 on 5 wafers. The first 2 had pressure tolerance alarms during step 3. The last 2 passed. I then ran 5 wafers on recipe 1 and they all passed. I then ran one wafer on recipe 99 and it hit the error again. During this time, there was also a very strong bad odor - similar to burning electronics (another user described it as a freon smell). So I discontinued using the tool for the night. I am not sure if the odor came from lampoly or somewhere else. From mtang at snf.stanford.edu Wed Jun 20 06:39:40 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 20 Jun 2012 06:39:40 -0700 Subject: Shutdown lampoly SNF 2012-06-20 06:39:39: Pressure tolerance & odor Message-ID: Down to check reported problems. From mtang at snf.stanford.edu Wed Jun 20 15:34:05 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 20 Jun 2012 15:34:05 -0700 Subject: Shutdown lampoly SNF 2012-06-20 15:34:04: Pressure tolerance problem Message-ID: Ran recipe 99 and observed that the turbo frequency dropped from 400 kHz to 370 over the course of the 5 min. etch. It didn't recover to 400 before the next wafer loaded, so dropped more with the next process. (Sorry, didn't properly note the time and frequency.) I suspect this is why the pressure tolerance faulted for recipe 99 but not recipe 1 (which is shorter and has lower gas flows.) The chiller is also low on coolant. Will keep the machine down until the maintenance crew can diagnose why the turbo is getting loaded. From mtang at snf.stanford.edu Wed Jun 20 15:34:53 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 20 Jun 2012 15:34:53 -0700 Subject: Shutdown lampoly SNF 2012-06-20 06:39:39: Pressure tolerance & odor Message-ID: See shutdown description for 6/20 3:30 pm. From mtang at snf.stanford.edu Fri Jun 22 12:19:51 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 22 Jun 2012 12:19:51 -0700 Subject: Comment lampoly SNF 2012-06-22 12:19:51: Machine checkout Message-ID: Chamber rate of rise is 0.13 mt/min (good.) Gas flow errors are within tolerance (5% FS) except for N2. Chamber reference pressure (index 39) is about 45 mtorr. This is basically the backing pump foreline pressure. Historically, this has been 35 mtorr. This could be different for a variety of reasons that we should check and may or may not be significant, but am noting it here. From cbaxter at snf.stanford.edu Mon Jun 25 09:02:22 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 25 Jun 2012 09:02:22 -0700 Subject: Comment lampoly SNF 2012-06-25 09:02:21: Chamber Message-ID: He leak checked chamber and foreline, found a decade leak on the foreline after the main isolation valve. we're in progress of testing the tool.. From cbaxter at snf.stanford.edu Mon Jun 25 10:35:58 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 25 Jun 2012 10:35:58 -0700 Subject: Shutdown lampoly SNF 2012-06-20 15:34:04: Pressure tolerance problem Message-ID: Ran recipe 99 and recipe 1 with no problems. Will keep under observatiion From mtang at snf.stanford.edu Mon Jun 25 17:01:35 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 25 Jun 2012 17:01:35 -0700 Subject: Problem lampoly SNF 2012-06-19 23:05:57: pressure hard tolerance fault and odor Message-ID: See Cesar's comment from 6/25/12 am. From mtang at snf.stanford.edu Mon Jun 25 17:08:05 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 25 Jun 2012 17:08:05 -0700 Subject: Problem lampoly SNF 2012-06-25 17:08:04: Restricted use Message-ID: For the time being, use of lampoly is limited to recipes #1 and #90 (no SF6, total gas flow <150 sccm, total etch time <3 min/wafer). Cesar found and repaired a foreline leak, but we have not yet tested all recipes. From bchui at snf.stanford.edu Mon Jun 25 18:05:58 2012 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Mon, 25 Jun 2012 18:05:58 -0700 Subject: Comment lampoly SNF 2012-06-25 18:05:57: Turbo held up fine Message-ID: Ran ~9 wafers, recipe 1, 20sec + 20sec, turbo held up fine, at least 398Hz. From bchui at snf.stanford.edu Tue Jun 26 14:19:36 2012 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Tue, 26 Jun 2012 14:19:36 -0700 Subject: Problem lampoly SNF 2012-06-26 14:19:36: internal timer will overflow in 72 hours Message-ID: needs reset before then From wshuang at snf.stanford.edu Thu Jun 28 21:09:57 2012 From: wshuang at snf.stanford.edu (wshuang at snf.stanford.edu) Date: Thu, 28 Jun 2012 21:09:57 -0700 Subject: Shutdown lampoly SNF 2012-06-28 21:09:57: Shut down due to alarm 184 water chiller is failed Message-ID: When I was trying to use it tonight, I put the hold up-side-down, so there was a alarm due to alarm 57 of shuttle failure. I tried to fix it, but I couldn't. I tried disable and enable it on coral for 2 times, and suddenly the 184 alarm appeared. I don't know what to do and there's a alarm sound so I shut it down on coral. From mtang at snf.stanford.edu Fri Jun 29 09:48:32 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 29 Jun 2012 09:48:32 -0700 Subject: Shutdown lampoly SNF 2012-06-28 21:09:57: Shut down due to alarm 184 water chiller is failed Message-ID: Cassette jam, removed. Will fill chiller. Pradeep checking wafer handoff now. From pnataraj at snf.stanford.edu Fri Jun 29 11:22:55 2012 From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu) Date: Fri, 29 Jun 2012 11:22:55 -0700 Subject: Shutdown lampoly SNF 2012-06-29 11:22:55: No N2 Message-ID: From mtang at snf.stanford.edu Fri Jun 29 12:30:17 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 29 Jun 2012 12:30:17 -0700 Subject: Problem lampoly SNF 2012-06-29 12:30:17: Exit LL/Turbo purge alarms Message-ID: The exit loadlock is not coming up to ATM. Also, there is an alarm for turbo purge not being within setpoint. I wonder if there are related to process N2 supply - bad switch somewhere? From mtang at snf.stanford.edu Fri Jun 29 14:08:34 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 29 Jun 2012 14:08:34 -0700 Subject: Shutdown lampoly SNF 2012-06-29 11:22:55: No N2 Message-ID: The UHP N2 regulator had been turned all the way down. Mike turned it back to 25 psi and alarms all cleared. I also restarted the system (3 hours left to timeout fault.) From emyers at snf.stanford.edu Fri Jun 29 14:53:39 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 29 Jun 2012 14:53:39 -0700 Subject: Problem lampoly SNF 2012-06-29 14:53:38: Allarming Gas Box Shutdown Message-ID: Alarming for "shut down gas box due to pump or scrubbed exhaust failure" From emyers at snf.stanford.edu Fri Jun 29 15:26:40 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 29 Jun 2012 15:26:40 -0700 Subject: Problem lampoly SNF 2012-06-29 14:53:38: Allarming Gas Box Shutdown Message-ID: Mary rebooted the system while not enabled.