Shutdown lampoly SNF 2012-06-20 15:34:04: Pressure tolerance problem

mtang at snf.stanford.edu mtang at snf.stanford.edu
Wed Jun 20 15:34:05 PDT 2012


Ran recipe 99 and observed that the turbo frequency dropped from 400 kHz to 370 over the course of the 5 min. etch.  It didn't recover to 400 before the next wafer loaded, so dropped more with the next process.  (Sorry, didn't properly note the time and frequency.)  I suspect this is why the pressure tolerance faulted for recipe 99 but not recipe 1 (which is shorter and has lower gas flows.)
The chiller is also low on coolant.
Will keep the machine down until the maintenance crew can diagnose why the turbo is getting loaded.




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