Comment lampoly SNF 2012-06-22 12:19:51: Machine checkout

mtang at snf.stanford.edu mtang at snf.stanford.edu
Fri Jun 22 12:19:51 PDT 2012


Chamber rate of rise is 0.13 mt/min (good.)  Gas flow errors are within tolerance (5% FS) except for N2.  
Chamber reference pressure (index 39) is about 45 mtorr.  This is basically the backing pump foreline pressure.  Historically, this has been 35 mtorr.  This could be different for a variety of reasons that we should check and may or may not be significant, but am noting it here.




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