Problem lampoly SNF 2012-06-25 17:08:04: Restricted use

[mtang at snf.stanford.edu]

For the time being, use of lampoly is limited to recipes #1 and #90 (no SF6, total gas flow <150 sccm, total etch time <3 min/wafer).  Cesar found and repaired a foreline leak, but we have not yet tested all recipes.