Problem lampoly SNF 2012-06-25 17:08:04: Restricted use

mtang at snf.stanford.edu mtang at snf.stanford.edu
Mon Jun 25 17:08:05 PDT 2012


For the time being, use of lampoly is limited to recipes #1 and #90 (no SF6, total gas flow <150 sccm, total etch time <3 min/wafer).  Cesar found and repaired a foreline leak, but we have not yet tested all recipes.




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