Shutdown lampoly SNF 2012-06-28 21:09:57: Shut down due to alarm 184 water chiller is failed

mtang at snf.stanford.edu mtang at snf.stanford.edu
Fri Jun 29 09:48:32 PDT 2012


Cassette jam, removed.  Will fill chiller.  Pradeep checking wafer handoff now.




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