Problem lampoly SNF 2012-06-29 12:30:17: Exit LL/Turbo purge alarms

mtang at snf.stanford.edu mtang at snf.stanford.edu
Fri Jun 29 12:30:17 PDT 2012


The exit loadlock is not coming up to ATM.  Also, there is an alarm for turbo purge not being within setpoint.  I wonder if there are related to process N2 supply - bad switch somewhere?




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