From eenriquez at snf.stanford.edu Wed Mar 7 13:20:36 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 7 Mar 2012 13:20:36 -0800 Subject: Comment lampoly SNF 2012-02-28 14:04:40: Update Message-ID: Archived From eenriquez at snf.stanford.edu Wed Mar 7 13:22:55 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 7 Mar 2012 13:22:55 -0800 Subject: Comment lampoly SNF 2012-03-07 13:22:55: Update Message-ID: HBr will arrive on 3/9. System should be ready by 3:00 pm From eenriquez at snf.stanford.edu Mon Mar 12 11:25:22 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Mar 2012 11:25:22 -0700 Subject: Shutdown lampoly SNF 2011-12-12 10:02:04: Scheduled shutdown Message-ID: Scheduled work has been completed From eenriquez at snf.stanford.edu Mon Mar 12 11:26:05 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Mar 2012 11:26:05 -0700 Subject: Problem lampoly SNF 2011-12-11 15:58:16: Burned resist Message-ID: Wet cleaned the electrode and chamber. From eenriquez at snf.stanford.edu Mon Mar 12 11:26:12 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Mar 2012 11:26:12 -0700 Subject: Comment lampoly SNF 2011-12-12 16:43:40: Wet Clean Message-ID: archived From eenriquez at snf.stanford.edu Mon Mar 12 11:26:28 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Mar 2012 11:26:28 -0700 Subject: Problem lampoly SNF 2012-02-15 15:30:47: No Cl2 or HBr Message-ID: Cl2 and HBr is now available. From eenriquez at snf.stanford.edu Mon Mar 12 11:26:45 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Mar 2012 11:26:45 -0700 Subject: Comment lampoly SNF 2012-02-24 11:28:58: Cl2/HBr Update Message-ID: Cl2 and HBr is now available From eenriquez at snf.stanford.edu Mon Mar 12 11:26:52 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Mar 2012 11:26:52 -0700 Subject: Comment lampoly SNF 2012-03-07 13:22:55: Update Message-ID: Archived From eenriquez at snf.stanford.edu Mon Mar 12 11:27:13 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Mar 2012 11:27:13 -0700 Subject: Problem lampoly SNF 2012-03-12 11:27:12: Need to run a process qual Message-ID: From eenriquez at snf.stanford.edu Tue Mar 13 06:50:14 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 13 Mar 2012 06:50:14 -0700 Subject: Comment lampoly SNF 2011-12-11 07:36:13: No cooling water... Message-ID: archived From shott at snf.stanford.edu Wed Mar 14 06:50:48 2012 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Wed, 14 Mar 2012 06:50:48 -0700 Subject: Problem lampoly SNF 2012-03-14 06:50:47: No chlorine or HBr ... Message-ID: Chlorine and hydrogen bromide are unavailable while an emergency replacement of the exhaust duct happens in the corrosive gas vault. These gases should be available by Thursday at noon. John From shott at snf.stanford.edu Wed Mar 14 07:03:28 2012 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Wed, 14 Mar 2012 07:03:28 -0700 Subject: Problem lampoly SNF 2012-03-14 06:50:47: No chlorine or HBr ... Message-ID: This work cannot be done today because Decon crew were stranded with truck problems. It will be rescheduled for early next week. John From wslee at snf.stanford.edu Wed Mar 14 15:06:02 2012 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Wed, 14 Mar 2012 15:06:02 -0700 Subject: Problem lampoly SNF 2012-03-14 15:06:01: no dummies Message-ID: There are no dummies at lampoly. From wslee at snf.stanford.edu Thu Mar 15 13:00:24 2012 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Thu, 15 Mar 2012 13:00:24 -0700 Subject: Problem lampoly SNF 2012-03-15 13:00:24: water chiller Message-ID: Alarm says that the water chiller has failed. From mdickey at snf.stanford.edu Thu Mar 15 13:22:14 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 15 Mar 2012 13:22:14 -0700 Subject: Problem lampoly SNF 2012-03-15 13:00:24: water chiller Message-ID: chiller topped off From wslee at snf.stanford.edu Thu Mar 15 14:02:31 2012 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Thu, 15 Mar 2012 14:02:31 -0700 Subject: Problem lampoly SNF 2012-03-15 14:02:31: entrance load lock Message-ID: alarm: entrance load lock purge failed, Dummy wafers are stuck in lampoly. From eenriquez at snf.stanford.edu Fri Mar 16 14:20:14 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 16 Mar 2012 14:20:14 -0700 Subject: Problem lampoly SNF 2012-03-15 14:02:31: entrance load lock Message-ID: The system errored due to work with the N2 lines. Turned the N2 valve on and resumed the process. From wslee at snf.stanford.edu Mon Mar 19 06:59:31 2012 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Mon, 19 Mar 2012 06:59:31 -0700 Subject: Shutdown lampoly SNF 2012-03-19 06:59:31: wafer stuck inside Message-ID: Tried to run 10 wafers on recipe 99 - clean cycle. First wafer loaded into the first pumpdown chamber and then went to the etch chamber fine. However, the wafer would not move to the third chamber and no more wafers would load into the first pumpdown chamber. There was the same error as last Thursday afternoon " Entrance load lock purge failed. Atmosphere sense should be true." From eenriquez at snf.stanford.edu Mon Mar 19 10:52:01 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 19 Mar 2012 10:52:01 -0700 Subject: Shutdown lampoly SNF 2012-03-19 06:59:31: wafer stuck inside Message-ID: Intermittent entry load lock vent valve. Cycled the vent valve. Ran about 10 wafers with no problems. Will continue to monitor the problem. From eenriquez at snf.stanford.edu Mon Mar 19 10:52:26 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 19 Mar 2012 10:52:26 -0700 Subject: Problem lampoly SNF 2012-03-19 10:52:25: Intermittent entry LL vent Message-ID: From wslee at snf.stanford.edu Tue Mar 20 09:29:06 2012 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Tue, 20 Mar 2012 09:29:06 -0700 Subject: Comment lampoly SNF 2012-03-20 09:29:06: ran 20+ wafers Message-ID: Ran 10 oxide coated wafers with 5 min of recipe 99 (chamber clean) and 10 Si wafers of recipe 1 for 2 min. No LL problems. From cbaxter at snf.stanford.edu Tue Mar 20 16:20:02 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 20 Mar 2012 16:20:02 -0700 Subject: Problem lampoly SNF 2012-03-19 10:52:25: Intermittent entry LL vent Message-ID: Increase the n2 vent flow.. From usha at snf.stanford.edu Tue Mar 20 17:24:29 2012 From: usha at snf.stanford.edu (usha at snf.stanford.edu) Date: Tue, 20 Mar 2012 17:24:29 -0700 Subject: Comment lampoly SNF 2012-03-20 17:24:29: Qual Data Message-ID: Did Si and Oxide ER quals, gas cals and leak check. N2 MFC need checking. Results are: Chamber leak rate = 0.09mT/min ER Data for recipe 1; 10s BT/ 60s ME/30s OE: Si Loss (patterned wafer) = 4238A; Unif =1.89% Oxide Loss (blanket thermal oxide) = 206A; Unif = 7%. Gas Calibration: Gas Flow rate(sccm) Cal Error (sccm) Cl2 25 -2.09 HBr 100 +1.83 O2 5 +0.16 SF6 100 -0.04 He 50 -1.4 C2F6 100 +0.28 O2 50 +0.31 N2 25 -17.17 From eenriquez at snf.stanford.edu Wed Mar 21 07:41:03 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Mar 2012 07:41:03 -0700 Subject: Problem lampoly SNF 2012-03-14 15:06:01: no dummies Message-ID: We have dummies From eenriquez at snf.stanford.edu Wed Mar 21 07:42:05 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Mar 2012 07:42:05 -0700 Subject: Problem lampoly SNF 2012-03-12 11:27:12: Need to run a process qual Message-ID: Completed process quals From eenriquez at snf.stanford.edu Wed Mar 21 08:03:05 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Mar 2012 08:03:05 -0700 Subject: Comment lampoly SNF 2012-03-21 08:03:05: System check Message-ID: Cycled 5 wafers using the Clean1 recipe. No problems. From mtang at snf.stanford.edu Thu Mar 22 06:31:06 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 22 Mar 2012 06:31:06 -0700 Subject: Problem lampoly SNF 2012-03-22 06:31:06: No Cl2 or HBr Message-ID: Corrosives vault duct work replacement underway,. From eenriquez at snf.stanford.edu Fri Mar 23 14:38:28 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 23 Mar 2012 14:38:28 -0700 Subject: Problem lampoly SNF 2012-03-22 06:31:06: No Cl2 or HBr Message-ID: Cl2 and HBr are available. From xuanwu at snf.stanford.edu Fri Mar 23 21:38:42 2012 From: xuanwu at snf.stanford.edu (xuanwu at snf.stanford.edu) Date: Fri, 23 Mar 2012 21:38:42 -0700 Subject: Problem lampoly SNF 2012-03-23 21:38:42: Trap Vector 0 Bus Error Message-ID: Anyone know how to fix it? From xuanwu at snf.stanford.edu Fri Mar 23 21:39:47 2012 From: xuanwu at snf.stanford.edu (xuanwu at snf.stanford.edu) Date: Fri, 23 Mar 2012 21:39:47 -0700 Subject: Comment lampoly SNF 2012-03-23 21:39:46: Re: Trap Vector 0 Bus Error Message-ID: I came to the machine and that's what it said. No amount of pressing buttons seemed to work. From daesung at snf.stanford.edu Sat Mar 24 15:15:34 2012 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Sat, 24 Mar 2012 15:15:34 -0700 Subject: Shutdown lampoly SNF 2012-03-24 15:15:33: Bus error Message-ID: Cannot use the tool From cbaxter at snf.stanford.edu Sun Mar 25 06:57:47 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 25 Mar 2012 06:57:47 -0700 Subject: Shutdown lampoly SNF 2012-03-24 15:15:33: Bus error Message-ID: Reset system and cycled wafers.. From cbaxter at snf.stanford.edu Sun Mar 25 06:58:17 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 25 Mar 2012 06:58:17 -0700 Subject: Comment lampoly SNF 2012-03-23 21:39:46: Re: Trap Vector 0 Bus Error Message-ID: Cleared error... From cbaxter at snf.stanford.edu Sun Mar 25 06:58:23 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 25 Mar 2012 06:58:23 -0700 Subject: Problem lampoly SNF 2012-03-23 21:38:42: Trap Vector 0 Bus Error Message-ID: From daesung at snf.stanford.edu Mon Mar 26 01:30:40 2012 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Mon, 26 Mar 2012 01:30:40 -0700 Subject: Problem lampoly SNF 2012-03-26 01:30:40: Water chiller failure alarm Message-ID: From mdickey at snf.stanford.edu Mon Mar 26 06:42:02 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 26 Mar 2012 06:42:02 -0700 Subject: Problem lampoly SNF 2012-03-26 01:30:40: Water chiller failure alarm Message-ID: Chiller topped off From edfei at snf.stanford.edu Tue Mar 27 13:42:24 2012 From: edfei at snf.stanford.edu (edfei at snf.stanford.edu) Date: Tue, 27 Mar 2012 13:42:24 -0700 Subject: Shutdown lampoly SNF 2012-03-27 13:42:24: gas box down Message-ID: Alarm 314: Gas box disabled due to failure of external pump or scrubber From eenriquez at snf.stanford.edu Tue Mar 27 13:55:57 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 27 Mar 2012 13:55:57 -0700 Subject: Shutdown lampoly SNF 2012-03-27 13:42:24: gas box down Message-ID: enabled system and cleared the alarm From popomoo at snf.stanford.edu Wed Mar 28 20:39:43 2012 From: popomoo at snf.stanford.edu (popomoo at snf.stanford.edu) Date: Wed, 28 Mar 2012 20:39:43 -0700 Subject: Problem lampoly SNF 2012-03-28 20:39:42: water chiller has failed Message-ID: From mdickey at snf.stanford.edu Thu Mar 29 06:48:20 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 29 Mar 2012 06:48:20 -0700 Subject: Problem lampoly SNF 2012-03-28 20:39:42: water chiller has failed Message-ID: topped off chiller