Shutdown lampoly SNF 2012-03-19 06:59:31: wafer stuck inside

wslee at wslee at
Mon Mar 19 06:59:31 PDT 2012

Tried to run 10 wafers on recipe 99 - clean cycle. First wafer loaded into the first pumpdown chamber and then went to the etch chamber fine. However, the wafer would not move to the third chamber and no more wafers would load into the first pumpdown chamber.
There was the same error as last Thursday afternoon " Entrance load lock purge failed. Atmosphere sense should be true." 

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