Shutdown lampoly SNF 2012-03-19 06:59:31: wafer stuck inside

wslee at snf.stanford.edu wslee at snf.stanford.edu
Mon Mar 19 06:59:31 PDT 2012


Tried to run 10 wafers on recipe 99 - clean cycle. First wafer loaded into the first pumpdown chamber and then went to the etch chamber fine. However, the wafer would not move to the third chamber and no more wafers would load into the first pumpdown chamber.
There was the same error as last Thursday afternoon " Entrance load lock purge failed. Atmosphere sense should be true." 




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