Shutdown lampoly SNF 2012-03-19 06:59:31: wafer stuck inside

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Mar 19 10:52:01 PDT 2012


Intermittent entry load lock vent valve.  Cycled the vent valve.  Ran about 10 wafers with no problems.  Will continue to monitor the problem.




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