Comment lampoly SNF 2012-03-20 09:29:06: ran 20+ wafers

wslee at snf.stanford.edu wslee at snf.stanford.edu
Tue Mar 20 09:29:06 PDT 2012


Ran 10 oxide coated wafers with 5 min of recipe 99 (chamber clean) and 10 Si wafers of recipe 1 for 2 min. No LL problems.




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