From eenriquez at snf.stanford.edu Fri May 4 06:54:42 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 4 May 2012 06:54:42 -0700 Subject: Comment lampoly SNF 2012-05-04 06:54:41: Update Message-ID: The repaired generator is at final test and should ship today. If all goes well, we should have the generator by mid next week. From mtang at snf.stanford.edu Tue May 8 11:08:09 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 8 May 2012 11:08:09 -0700 Subject: Comment lampoly SNF 2012-05-08 11:08:08: Update Message-ID: Rebuilt, calibrated RF generator arrived and was installed yesterday. Reset machine parameters assuming that the generator was calibrated to standard. The DC bias, however, is lower than before -- at -45 V/-60V/ -45V on the RF-on steps for recipe 1 versus -55/-80/-55 with the previous generator. Working with Elmer to investigate. From mtang at snf.stanford.edu Tue May 8 15:12:44 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 8 May 2012 15:12:44 -0700 Subject: Shutdown lampoly SNF 2012-04-17 23:35:58: Failure during etching Message-ID: Elmer replaced the lower electrode generator with a newly recalibrated unit. The configuration parameters for RF#1 FW ao and ai were adjusted accordingly (used to be 1350, now 1250W full range.) This was saved into Config.sys. Test wafers show normal DC bias (~-60V, ~-80V, ~-60V for steps 3,5, and 7 of recipe #1). Silicon Etch rate test looks good (see comments for detailed results). A full qual will be done later. From mtang at snf.stanford.edu Tue May 8 15:23:10 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 8 May 2012 15:23:10 -0700 Subject: Comment lampoly SNF 2012-05-08 15:23:09: Silicon Etch Rate Qual Message-ID: Hi all -- Single crystal silicon etch qual results, basic resist on silicon (litho qual wafer), using recipe #1, timed etch for 10", 60", and 30" in RF steps 3, 5, and 7: Silicon etch depth: 4170 A (expect 3600 A- 4800A) Silicon etch nonuniformity: 0.8% (expect <2%) Selectivity to resist: 5.6 (expect about 4.3 - this is on the high side.) DC Bias is good. The basic qual is good, so the machine is OK to run. As always, please check your own recipes with test wafers before committing your device wafers. From eenriquez at snf.stanford.edu Fri May 11 06:48:11 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 May 2012 06:48:11 -0700 Subject: Comment lampoly SNF 2012-04-19 07:01:22: Update Message-ID: Archived From eenriquez at snf.stanford.edu Fri May 11 06:48:19 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 May 2012 06:48:19 -0700 Subject: Comment lampoly SNF 2012-04-19 14:57:00: Update Message-ID: Archived From eenriquez at snf.stanford.edu Fri May 11 06:48:27 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 May 2012 06:48:27 -0700 Subject: Comment lampoly SNF 2012-04-23 10:34:27: ETA for lampoly return to service? Message-ID: Archived From eenriquez at snf.stanford.edu Fri May 11 06:48:38 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 May 2012 06:48:38 -0700 Subject: Comment lampoly SNF 2012-05-04 06:54:41: Update Message-ID: Archived From eenriquez at snf.stanford.edu Fri May 11 06:48:44 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 May 2012 06:48:44 -0700 Subject: Comment lampoly SNF 2012-05-08 11:08:08: Update Message-ID: Archived From eenriquez at snf.stanford.edu Fri May 11 06:48:57 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 May 2012 06:48:57 -0700 Subject: Comment lampoly SNF 2011-02-23 13:54:15: PM & Qual Data Message-ID: Archived From eenriquez at snf.stanford.edu Fri May 11 06:49:03 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 May 2012 06:49:03 -0700 Subject: Comment lampoly SNF 2011-04-05 06:45:34: Etch Rate Qual Data from 3/31/2011 Message-ID: Archived From cchen86 at snf.stanford.edu Sun May 13 21:47:22 2012 From: cchen86 at snf.stanford.edu (cchen86 at snf.stanford.edu) Date: Sun, 13 May 2012 21:47:22 -0700 Subject: Shutdown lampoly SNF 2012-05-13 21:47:22: Alarm 1 when cleaning Message-ID: Alarm 1: Entrance load lock purge failed. This appeared when i was running the cleanning recipe (#99). From eenriquez at snf.stanford.edu Mon May 14 14:53:22 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 14 May 2012 14:53:22 -0700 Subject: Shutdown lampoly SNF 2012-05-13 21:47:22: Alarm 1 when cleaning Message-ID: Increased the entry load lock vent pressure. Cycled 6 wafers with no problems. From cchen86 at snf.stanford.edu Mon May 14 21:05:16 2012 From: cchen86 at snf.stanford.edu (cchen86 at snf.stanford.edu) Date: Mon, 14 May 2012 21:05:16 -0700 Subject: Shutdown lampoly SNF 2012-05-14 21:05:16: Recipe aborted during cleaning recipe Message-ID: Hi, all, The machine reported #81 alarm: 81. Recipe aborted. RF hard tolerance exceeded during an RF on step. I don't know the seriousness of this alarm so I decide to shut the machine down with the dummy wafers in the chamber. Chen From cbaxter at snf.stanford.edu Tue May 15 15:03:29 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 15 May 2012 15:03:29 -0700 Subject: Shutdown lampoly SNF 2012-05-14 21:05:16: Recipe aborted during cleaning recipe Message-ID: The recipe clean is not a good recipe, changed step3 from stability to time to give more time to stablize the pressure before striking plasma. From mtang at snf.stanford.edu Wed May 16 17:19:55 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 16 May 2012 17:19:55 -0700 Subject: Shutdown lampoly SNF 2012-05-16 17:19:54: Entrance loadlock not reaching ATM Message-ID: Dummy wafers inside. This is an intermittent problem (though admittedly, not intermittent enough...) Elmer & Cesar say that the entry loadlock vent valve actuator is leaky. A one-for-one replacement is difficult to locate. They are trying to see if they can use a standard nupro. From cbaxter at snf.stanford.edu Thu May 17 16:42:16 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 17 May 2012 16:42:16 -0700 Subject: Shutdown lampoly SNF 2012-05-16 17:19:54: Entrance loadlock not reaching ATM Message-ID: I swapped the solenoid (vent valve) v65 with v6(not use) and cycled 100 wafers total and no problem with entrance l/l from venting to atm. From lindaohara at snf.stanford.edu Fri May 18 12:17:16 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 18 May 2012 12:17:16 -0700 Subject: Shutdown lampoly SNF 2012-05-18 12:17:16: Alarm Wafer not sensed at exit cassette Message-ID: From cbaxter at snf.stanford.edu Fri May 18 14:02:27 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 18 May 2012 14:02:27 -0700 Subject: Shutdown lampoly SNF 2012-05-18 12:17:16: Alarm Wafer not sensed at exit cassette Message-ID: The wafer broke inside the chamber, vented chamber and vacuum preces of broken wafer. Chcecked wafer handoff from chamber to unload arm to reciever cassette. From wslee at snf.stanford.edu Thu May 24 11:51:58 2012 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Thu, 24 May 2012 11:51:58 -0700 Subject: Comment lampoly SNF 2012-05-24 11:51:58: recipe 99 was way off Message-ID: Someone saved a recipe over number 99. Remember to NEVER save a recipe over 99 or recipe 1. I went ahead and manually re-entered the recipe. Double check to make sure it is okay when you use it.