Comment lampoly SNF 2012-05-08 11:08:08: Update

mtang at snf.stanford.edu mtang at snf.stanford.edu
Tue May 8 11:08:09 PDT 2012


Rebuilt, calibrated RF generator arrived and was installed yesterday.  Reset machine parameters assuming that the generator was calibrated to standard.  The DC bias, however, is lower than before -- at -45 V/-60V/ -45V on the RF-on steps for recipe 1 versus -55/-80/-55 with the previous generator.  Working with Elmer to investigate.




More information about the lampoly-pcs mailing list