Shutdown lampoly SNF 2012-04-17 23:35:58: Failure during etching

mtang at snf.stanford.edu mtang at snf.stanford.edu
Tue May 8 15:12:44 PDT 2012


Elmer replaced the lower electrode generator with a newly recalibrated unit.  The configuration parameters for RF#1 FW ao and ai were adjusted accordingly (used to be 1350, now 1250W full range.)  This was saved into Config.sys.
Test wafers show normal DC bias (~-60V, ~-80V, ~-60V for steps 3,5, and 7 of recipe #1).  
Silicon Etch rate test looks good (see comments for detailed results).  A full qual will be done later.




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