Shutdown lampoly SNF 2012-05-13 21:47:22: Alarm 1 when cleaning

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon May 14 14:53:22 PDT 2012


Increased the entry load lock vent pressure.  Cycled 6 wafers with no problems.




More information about the lampoly-pcs mailing list