Shutdown lampoly SNF 2012-05-14 21:05:16: Recipe aborted during cleaning recipe

cchen86 at snf.stanford.edu cchen86 at snf.stanford.edu
Mon May 14 21:05:16 PDT 2012


Hi, all,
The machine reported #81 alarm:
81. Recipe aborted. RF hard tolerance exceeded during an RF on step.
I don't know the seriousness of this alarm so I decide to shut the machine down with the dummy wafers in the chamber.
Chen




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