Shutdown lampoly SNF 2012-05-16 17:19:54: Entrance loadlock not reaching ATM

mtang at snf.stanford.edu mtang at snf.stanford.edu
Wed May 16 17:19:55 PDT 2012


Dummy wafers inside.  This is an intermittent problem (though admittedly, not intermittent enough...)  Elmer & Cesar say that the entry loadlock vent valve actuator is leaky.  A one-for-one replacement is difficult to locate.  They are trying to see if they can use a standard nupro.




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