Shutdown lampoly SNF 2012-05-16 17:19:54: Entrance loadlock not reaching ATM

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Thu May 17 16:42:16 PDT 2012


I swapped the solenoid (vent valve) v65 with v6(not use) and
cycled 100 wafers total and no problem with entrance l/l
from venting to atm.




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